Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

Y. F. Lu, L. Zhang, W. D. Song, Y. W. Zheng, B. S. Luk'yanchuk

Research output: Contribution to journalArticle

94 Scopus citations

Abstract

Spherical 0.5-μm silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography.

Original languageEnglish (US)
Pages (from-to)457-459
Number of pages3
JournalJETP Letters
Volume72
Issue number9
DOIs
StatePublished - Nov 10 2000

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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