Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

Y. F. Lu; L. Zhang; W. D. Song; Y. W. Zheng; B. S. Luk'yanchuk

doi:10.1134/1.1339899

Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

Y. F. Lu, L. Zhang, W. D. Song, Y. W. Zheng, B. S. Luk'yanchuk

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122 Scopus citations

Abstract

Spherical 0.5-μm silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography.

Original language	English (US)
Pages (from-to)	457-459
Number of pages	3
Journal	JETP Letters
Volume	72
Issue number	9
DOIs	https://doi.org/10.1134/1.1339899
State	Published - Nov 10 2000
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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@article{74154488e59a4373a5d1e12cf970539e,

title = "Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation",

abstract = "Spherical 0.5-μm silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography.",

author = "Lu, {Y. F.} and L. Zhang and Song, {W. D.} and Zheng, {Y. W.} and Luk'yanchuk, {B. S.}",

note = "Funding Information: The authors thank Dr. S.M. Huang, Ms. W.J. Wang and Mr. X.Y. Chen for their kind assistance in our experiment. The authors also thank Dr. Z.H. Mai (AMD, Singapore) for his contributions to our work. We are grateful to the authors of [20] for rapid information about their experiments. B.L. is grateful to Prof. S. Anisimov for discussions and to the people at the Data Storage Institute at National University of Singapore for their hospitality. This work was supported in part by the Russian Foundation for Basic Research project no. 98-02-16104.",

year = "2000",

month = nov,

day = "10",

doi = "10.1134/1.1339899",

language = "English (US)",

volume = "72",

pages = "457--459",

journal = "JETP Letters",

issn = "0021-3640",

publisher = "Maik Nauka-Interperiodica Publishing",

number = "9",

}

TY - JOUR

T1 - Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

AU - Lu, Y. F.

AU - Zhang, L.

AU - Song, W. D.

AU - Zheng, Y. W.

AU - Luk'yanchuk, B. S.

N1 - Funding Information: The authors thank Dr. S.M. Huang, Ms. W.J. Wang and Mr. X.Y. Chen for their kind assistance in our experiment. The authors also thank Dr. Z.H. Mai (AMD, Singapore) for his contributions to our work. We are grateful to the authors of [20] for rapid information about their experiments. B.L. is grateful to Prof. S. Anisimov for discussions and to the people at the Data Storage Institute at National University of Singapore for their hospitality. This work was supported in part by the Russian Foundation for Basic Research project no. 98-02-16104.

PY - 2000/11/10

Y1 - 2000/11/10

N2 - Spherical 0.5-μm silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography.

AB - Spherical 0.5-μm silica particles were placed on a silicon (100) substrate. After laser illumination with a 248-nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. The mechanism of the formation of the subwavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on the surface. Theoretically calculated near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle-enhanced laser irradiation has potential applications in nanolithography.

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DO - 10.1134/1.1339899

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JO - JETP Letters

JF - JETP Letters

IS - 9

ER -

Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation

Abstract

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