Local deposition of diamond-like carbon films on tungsten tips by KRF excimer laser

J. Shi, Y. F. Lu, R. S. Cherukuri, K. K. Mendu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Diamond-like carbon (DLC) films were deposited on tungsten tips under KrF excimer laser irradiation in benzene solution. The influence of laser fluence and tip geometry were studied. The deposition process was found to be highly dependent on tip sharpness. Tips with larger curvature radii and smaller aspect ratios could not be coated with DLC films under the same condition as that for sharp tips. Raman spectra showed that more sp3 tetrahedral structures were present in the DLC films on a tip with a smaller curvature radius. Simulation results showed that the tip sharpness dependent local optical enhancement played an important role in the DLC deposition process. An optical field gradient from apex to tip body was also found in the simulation. We suggest that there are two modes in the process of DLC deposition on nanotips under different laser fluences, i.e. local apex DLC deposition under low laser fluences and phase-graded DLC deposition under high laser fluences.

Original languageEnglish (US)
Title of host publicationICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
PublisherLaser Institute of America
ISBN (Print)0912035773, 9780912035772
DOIs
StatePublished - 2004
EventICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics - San Francisco, CA, United States
Duration: Oct 4 2004Oct 7 2004

Publication series

NameICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CitySan Francisco, CA
Period10/4/0410/7/04

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

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    Shi, J., Lu, Y. F., Cherukuri, R. S., & Mendu, K. K. (2004). Local deposition of diamond-like carbon films on tungsten tips by KRF excimer laser. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings). Laser Institute of America. https://doi.org/10.2351/1.5060290