Low-Loss Planar Optical Waveguides Fabricated in SIMOX Material

A. Rickman; G. T. Reed; B. L. Weiss; F. Namavar

doi:10.1109/68.141992

Low-Loss Planar Optical Waveguides Fabricated in SIMOX Material

A. Rickman, G. T. Reed, B. L. Weiss, F. Namavar

Orthopaedic Surgery & Rehabilitation

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84 Scopus citations

Abstract

Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss has been studied. Waveguides with guiding layer thickness of approximately 6 μm, have been measured, and a lowest loss, which is of the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 μm, at a measurement wavelength of 1.523 μm,.

Original language	English (US)
Pages (from-to)	633-635
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	4
Issue number	6
DOIs	https://doi.org/10.1109/68.141992
State	Published - Jun 1992

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/68.141992

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title = "Low-Loss Planar Optical Waveguides Fabricated in SIMOX Material",

abstract = "Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss has been studied. Waveguides with guiding layer thickness of approximately 6 μm, have been measured, and a lowest loss, which is of the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 μm, at a measurement wavelength of 1.523 μm,.",

author = "A. Rickman and Reed, {G. T.} and Weiss, {B. L.} and F. Namavar",

note = "Funding Information: Manuscript received December 5, 1991; revised March 20, 1992. This work was supported by the Science and Engineering Research Council (SERC) and Bookham Technology Ltd. A. Rickman is with the Departments of Electronic and Electrical Engineering and Physics, University of Surrey, Guildford, Surrey, UK. G. T. Reed and B. L. Weiss are with the Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, UK. F. Namavar is with Thin Films Division, Spire Corporation, Bedford, MA. IEEE Log Number 9200925.",

year = "1992",

month = jun,

doi = "10.1109/68.141992",

language = "English (US)",

volume = "4",

pages = "633--635",

journal = "IEEE Photonics Technology Letters",

issn = "1041-1135",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - Low-Loss Planar Optical Waveguides Fabricated in SIMOX Material

AU - Rickman, A.

AU - Reed, G. T.

AU - Weiss, B. L.

AU - Namavar, F.

N1 - Funding Information: Manuscript received December 5, 1991; revised March 20, 1992. This work was supported by the Science and Engineering Research Council (SERC) and Bookham Technology Ltd. A. Rickman is with the Departments of Electronic and Electrical Engineering and Physics, University of Surrey, Guildford, Surrey, UK. G. T. Reed and B. L. Weiss are with the Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, UK. F. Namavar is with Thin Films Division, Spire Corporation, Bedford, MA. IEEE Log Number 9200925.

PY - 1992/6

Y1 - 1992/6

N2 - Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss has been studied. Waveguides with guiding layer thickness of approximately 6 μm, have been measured, and a lowest loss, which is of the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 μm, at a measurement wavelength of 1.523 μm,.

AB - Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss has been studied. Waveguides with guiding layer thickness of approximately 6 μm, have been measured, and a lowest loss, which is of the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 μm, at a measurement wavelength of 1.523 μm,.

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Low-Loss Planar Optical Waveguides Fabricated in SIMOX Material

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