Low-temperature (< 100°C) growth of AIN by ion beam assisted deposition

H. Karimy, E. Tobin, R. Bricault, A. Cremins-Costa, P. Colter, D. Perry, F. Namavar

Research output: Contribution to journalConference article

Fingerprint Dive into the research topics of 'Low-temperature (< 100°C) growth of AIN by ion beam assisted deposition'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy