Low temperature ordering of FePt films by in-situ heating deposition plus post deposition annealing

Y. S. Yu, Hai Bo Li, W. L. Li, Mei Liu, Yu Mei Zhang, W. D. Fei, D. J. Sellmyer

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

FePt thin films with 40 nm thickness were prepared on thermally oxidized Si (001) substrates by dc magnetron sputtering at the nominal growth temperature 375 °C. The effects of annealing on microstructure and magnetic properties of FePt thin films were investigated. The as-deposited FePt thin films show soft magnetic properties. After the as-deposited FePt thin films were annealed at various temperatures and furnace cooled, it is found that the ordering temperature of L10 FePt phase could be reduced to 350 °C. For FePt thin films annealed at 350 °C, the in-plane and out-of-plane coercivities of the films increased to 510 and 543 kA/m, respectively, and the films had hard magnetic properties. A highly (001) orientation was obtained, when FePt thin films were annealed at 600 °C. And the hysteresis loops of FePt thin films annealed at 600 °C show out-of-plane magnetic anisotropy.

Original languageEnglish (US)
Pages (from-to)2171-2174
Number of pages4
JournalThin Solid Films
Volume518
Issue number8
DOIs
StatePublished - Feb 1 2010

Keywords

  • Annealing
  • Coercivity
  • FePt
  • Low temperature ordering
  • Magnetic films
  • Sputtering

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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