Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks

E. Sossna; A. Degen; I. W. Rangelow; M. Drzik; P. Hudek; T. E. Tiwald; J. A. Woollam

doi:10.1116/1.1417548

Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks

E. Sossna, A. Degen, I. W. Rangelow, M. Drzik, P. Hudek, T. E. Tiwald, J. A. Woollam

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A study was carried out to show quantitative and qualitative determination of the mechanical properties of the true thickness, thickness variation (morphology), and electrical conductivity. An interferometric method of precise thickness variation measurement of silicon membranes was presented. By evaluating the intensity distribution throughout the area of the membrane image using defocusing, it was possible to determine the absolute values of membrane thickness variations.

Original language	English (US)
Pages (from-to)	2665-2670
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	6
DOIs	https://doi.org/10.1116/1.1417548
State	Published - Nov 2001
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1417548

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abstract = "A study was carried out to show quantitative and qualitative determination of the mechanical properties of the true thickness, thickness variation (morphology), and electrical conductivity. An interferometric method of precise thickness variation measurement of silicon membranes was presented. By evaluating the intensity distribution throughout the area of the membrane image using defocusing, it was possible to determine the absolute values of membrane thickness variations.",

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T1 - Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks

AU - Sossna, E.

AU - Degen, A.

AU - Rangelow, I. W.

AU - Drzik, M.

AU - Hudek, P.

AU - Tiwald, T. E.

AU - Woollam, J. A.

PY - 2001/11

Y1 - 2001/11

N2 - A study was carried out to show quantitative and qualitative determination of the mechanical properties of the true thickness, thickness variation (morphology), and electrical conductivity. An interferometric method of precise thickness variation measurement of silicon membranes was presented. By evaluating the intensity distribution throughout the area of the membrane image using defocusing, it was possible to determine the absolute values of membrane thickness variations.

AB - A study was carried out to show quantitative and qualitative determination of the mechanical properties of the true thickness, thickness variation (morphology), and electrical conductivity. An interferometric method of precise thickness variation measurement of silicon membranes was presented. By evaluating the intensity distribution throughout the area of the membrane image using defocusing, it was possible to determine the absolute values of membrane thickness variations.

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ER -

Mechanical, geometrical, and electrical characterization of silicon membranes for open stencil masks

Abstract

ASJC Scopus subject areas

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