A study was carried out to show quantitative and qualitative determination of the mechanical properties of the true thickness, thickness variation (morphology), and electrical conductivity. An interferometric method of precise thickness variation measurement of silicon membranes was presented. By evaluating the intensity distribution throughout the area of the membrane image using defocusing, it was possible to determine the absolute values of membrane thickness variations.
|Original language||English (US)|
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Nov 2001|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering