MEMS torsion oscillator magnetic field sensor

Xiaolu Yin, Qianqian Jiao, Lu Yuan, Sy Hwang Liou

Research output: Contribution to journalArticle

7 Scopus citations

Abstract

We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

Original languageEnglish (US)
Article number6559313
Pages (from-to)3890-3892
Number of pages3
JournalIEEE Transactions on Magnetics
Volume49
Issue number7
DOIs
StatePublished - 2013

Keywords

  • MEMS
  • Magnetic field sensor
  • torsion oscillator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'MEMS torsion oscillator magnetic field sensor'. Together they form a unique fingerprint.

  • Cite this