MEMS torsion oscillator magnetic field sensor

Xiaolu Yin; Qianqian Jiao; Lu Yuan; Sy Hwang Liou

doi:10.1109/TMAG.2013.2252153

MEMS torsion oscillator magnetic field sensor

Xiaolu Yin, Qianqian Jiao, Lu Yuan, Sy Hwang Liou

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe_77.5Si_7.5B₁₅ wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

Original language	English (US)
Article number	6559313
Pages (from-to)	3890-3892
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	49
Issue number	7
DOIs	https://doi.org/10.1109/TMAG.2013.2252153
State	Published - 2013

Keywords

MEMS
Magnetic field sensor
torsion oscillator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/TMAG.2013.2252153

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abstract = "We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.",

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author = "Xiaolu Yin and Qianqian Jiao and Lu Yuan and Liou, {Sy Hwang}",

year = "2013",

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journal = "IEEE Transactions on Magnetics",

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T1 - MEMS torsion oscillator magnetic field sensor

AU - Yin, Xiaolu

AU - Jiao, Qianqian

AU - Yuan, Lu

AU - Liou, Sy Hwang

PY - 2013

Y1 - 2013

N2 - We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

AB - We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

KW - MEMS

KW - Magnetic field sensor

KW - torsion oscillator

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SP - 3890

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JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

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MEMS torsion oscillator magnetic field sensor

Abstract

Keywords

ASJC Scopus subject areas

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