Abstract
We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.
Original language | English (US) |
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Article number | 6559313 |
Pages (from-to) | 3890-3892 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 49 |
Issue number | 7 |
DOIs | |
State | Published - 2013 |
Keywords
- MEMS
- Magnetic field sensor
- torsion oscillator
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering