MEMS torsion oscillator magnetic field sensor

Xiaolu Yin, Qianqian Jiao, Lu Yuan, Sy Hwang Liou

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


We developed a new sensitive microcantilever torque magnetometer-based magnetic field sensor that can detect magnetic field changes of a few nano-Tesla under ambient conditions. This sensor consists of a torsion oscillator, fabricated by a microelectromechanical systems (MEMS) process, and a soft magnetic Fe77.5Si7.5B15 wire. This paper describes the principle and details of the experimental set-up and demonstrates that the sensitivity can be further improved by modifying the spring constant of the cantilever.

Original languageEnglish (US)
Article number6559313
Pages (from-to)3890-3892
Number of pages3
JournalIEEE Transactions on Magnetics
Issue number7
StatePublished - 2013


  • MEMS
  • Magnetic field sensor
  • torsion oscillator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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