TY - GEN
T1 - Micro/nanoscale surface modification and structuring using lasers
AU - Lu, Y. F.
PY - 2006
Y1 - 2006
N2 - Laser material processing demonstrated its significance in many areas such as microelectronics, data storage, photonics and nanotechnology, since versatile laser sources provide flexible and unique energy source for precise control of material processing. The extreme conditions created by laser irradiation have provided strong impact on material research. To achieve nanoscale laser material machining and processing, we need to overcome the diffraction limit of the laser wavelengths. Recently, different approaches have been explored to overcome the diffraction limit and to achieve feature sizes down to 10 nm order, way beyond the diffraction limits. The author will provide an overview in the areas of laser-based micro/nanoscale surface modification and structuring, including his own research experience on laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, near-field-induced nanoscale deposition, laser cleaning of nanoparticles, near-field-controlled material deposition, laser-assisted growth of carbon nanotubes, and laser synthesis of one-dimensional carbon structures.
AB - Laser material processing demonstrated its significance in many areas such as microelectronics, data storage, photonics and nanotechnology, since versatile laser sources provide flexible and unique energy source for precise control of material processing. The extreme conditions created by laser irradiation have provided strong impact on material research. To achieve nanoscale laser material machining and processing, we need to overcome the diffraction limit of the laser wavelengths. Recently, different approaches have been explored to overcome the diffraction limit and to achieve feature sizes down to 10 nm order, way beyond the diffraction limits. The author will provide an overview in the areas of laser-based micro/nanoscale surface modification and structuring, including his own research experience on laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, near-field-induced nanoscale deposition, laser cleaning of nanoparticles, near-field-controlled material deposition, laser-assisted growth of carbon nanotubes, and laser synthesis of one-dimensional carbon structures.
KW - Laser micro/nanostructuring
KW - Laser nanoimprinting
KW - Laser surface processing
KW - Laser-assisted SPM
KW - Near-field effects
UR - http://www.scopus.com/inward/record.url?scp=33646583559&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33646583559&partnerID=8YFLogxK
U2 - 10.1117/12.658302
DO - 10.1117/12.658302
M3 - Conference contribution
AN - SCOPUS:33646583559
SN - 0819461482
SN - 9780819461483
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Photon Processing in Microelectronics and Photonics V
T2 - Photon Processing in Microelectronics and Photonics V
Y2 - 23 January 2006 through 26 January 2006
ER -