Micro/nanoscale surface modification and structuring using lasers

Y. F. Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Laser material processing demonstrated its significance in many areas such as microelectronics, data storage, photonics and nanotechnology, since versatile laser sources provide flexible and unique energy source for precise control of material processing. The extreme conditions created by laser irradiation have provided strong impact on material research. To achieve nanoscale laser material machining and processing, we need to overcome the diffraction limit of the laser wavelengths. Recently, different approaches have been explored to overcome the diffraction limit and to achieve feature sizes down to 10 nm order, way beyond the diffraction limits. The author will provide an overview in the areas of laser-based micro/nanoscale surface modification and structuring, including his own research experience on laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, near-field-induced nanoscale deposition, laser cleaning of nanoparticles, near-field-controlled material deposition, laser-assisted growth of carbon nanotubes, and laser synthesis of one-dimensional carbon structures.

Original languageEnglish (US)
Title of host publicationPhoton Processing in Microelectronics and Photonics V
StatePublished - 2006
EventPhoton Processing in Microelectronics and Photonics V - San Jose, CA, United States
Duration: Jan 23 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


ConferencePhoton Processing in Microelectronics and Photonics V
Country/TerritoryUnited States
CitySan Jose, CA


  • Laser micro/nanostructuring
  • Laser nanoimprinting
  • Laser surface processing
  • Laser-assisted SPM
  • Near-field effects

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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