Microstructures formed on silicon wafer by CO2 laser irradiation

Wang Weijie, Lu Yong Feng, An Chenwu, Hong Minghui

Research output: Contribution to journalConference articlepeer-review

Abstract

Laser bumps have been formed on the silicon surface with anisotropic patterns induced by the pulsed CO2 laser under the backside effect conditions. The microstructures are formed with periodic patterns, and vary with the laser parameters. The parallel narrow fringes have period around 2 μm, and the fringe orientation is in parallel with the laser polarization direction. The circular fringes with spacing around 1 μm appear when the laser energy increase. The fringe patterns were found to be independent on the laser pulses, therefore are re-writable. The bump formation mechanism is considered to be thermal capillary wave effect during the material melting and resolidification processes under laser irradiation. Whereas, the laser absorption may be induced by the hot electrons, or the thermal energy resulting from the laser interaction with the backside coating material.

Original languageEnglish (US)
Pages (from-to)166-169
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4426
DOIs
StatePublished - 2002
Externally publishedYes
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001

Keywords

  • And capillary effect
  • Microstructure
  • Opto-electronic effect
  • Periodic fringes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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