Abstract
In this paper, we present a miniature fiber optic pressure sensor. The sensor is extrinsic Fabry-Perot interferometer (EFPI) based with its FP cavity directly fabricated on the tip of the fiber by fusion splicing and chemical etching. The processes are simple, with no other materials but silica fibers involved. The sensor has the same dimension as the fiber itself, only 125μm in diameter. The length of the FP cavity and the interference pattern will change in response to ambient pressure variation. The signal is demodulated by tracing the spectrum shift. Sensitivity can be adjusted for different applications with low or high pressure range. Prototype sensors were fabricated and tested for static response. Dynamic measurements were performed in a turbine engine. Theoretical and experimental analysis of the sensor response are also presented.
| Original language | English (US) |
|---|---|
| Article number | 02 |
| Pages (from-to) | 11-18 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5590 |
| DOIs | |
| State | Published - 2004 |
| Externally published | Yes |
| Event | Sensors for Harsh Environments - Philadelphia, PA, United States Duration: Oct 26 2004 → Oct 27 2004 |
Keywords
- Fiber optic sensor
- Miniature
- Pressure sensor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering