Modified Forouhi and Bloomer dispersion model for the optical constants of amorphous hydrogenated carbon thin films

William A. McGahan, Tim Makovicka, Jeffrey Hale, John A. Woollam

Research output: Contribution to journalArticlepeer-review

50 Scopus citations

Abstract

The model of Forouhi and Bloomer (FB) for the optical properties of amorphous semiconductors is modified in order to describe more accurately the dispersion of the optical constants observed for amorphous carbon (a-C) and amorphous hydrogenated carbon (a-C:H) thin films. The FB model represents the optical absorption as the product of a lineshape function and a joint density of states function, which is derived by assuming the condition and valence bands to be parabolic and separated by an energy gap within which there are no allowed electronic states. Two modifications to this model are discussed to address the cases of non-parabolic bands and/or electron energy levels in the energy gap. These modified parametric models are then fit to a large number of a-C and a-C:H film optical constant spectra, and results are presented which indicate that non-parabolicity of the conduction and valence bands is the most important correction to the standard FB model required to describe a-C:H thin films. The modified model incorporating non-parabolic bands is shown to fit a broad range of both a-C and a-C:H spectra very well, and provides useful information about the optical absorption process and physical properties of the films.

Original languageEnglish (US)
Pages (from-to)57-61
Number of pages5
JournalThin Solid Films
Volume253
Issue number1-2
DOIs
StatePublished - Dec 15 1994

Keywords

  • Carbon
  • Ellipsometry
  • Hydrocarbons
  • Optical properties

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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