Motion controller for the atomic force microscopy based nanomanipulation system

Ruiguo Yang, Ning Xi, King Wai Chiu Lai, Bingtuan Gao, Hongzhi Chen, Chanmin Su, Jian Shi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response of the control system. We designed and implemented two distinct control schemes by using real-time Linux. The aim is to study various factors in the control of the AFM based nanomanipulation system. By integrating the original controller with the external Linux real-time controller, we achieved a stable system with high response frequency. Finally this Multiple Input Single Output (MISO) system is validated to be an effective and efficient tool for the controlling of the nanolithography operation through a haptic device.

Original languageEnglish (US)
Title of host publication2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009
Pages1339-1344
Number of pages6
DOIs
StatePublished - Dec 11 2009
Event2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009 - St. Louis, MO, United States
Duration: Oct 11 2009Oct 15 2009

Publication series

Name2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009

Conference

Conference2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009
CountryUnited States
CitySt. Louis, MO
Period10/11/0910/15/09

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Control and Systems Engineering

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  • Cite this

    Yang, R., Xi, N., Lai, K. W. C., Gao, B., Chen, H., Su, C., & Shi, J. (2009). Motion controller for the atomic force microscopy based nanomanipulation system. In 2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009 (pp. 1339-1344). [5353921] (2009 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2009). https://doi.org/10.1109/IROS.2009.5353921