Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors

Alexander Ruder, Brandon Wright, Rene Feder, Ufuk Kilic, Matthew Hilfiker, Eva Schubert, Craig M. Herzinger, Mathias Schubert

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

We demonstrate calibration and operation of a Mueller matrix imaging microscope using dual continuously rotating anisotropic mirrors for polarization state generation and analysis. The mirrors contain highly spatially coherent nanostructure slanted columnar titanium thin films deposited onto optically thick titanium layers on quartz substrates. The first mirror acts as polarization state image generator and the second mirror acts as polarization state image detector. The instrument is calibrated using samples consisting of laterally homogeneous properties such as straight-through-air, a clear aperture linear polarizer, and a clear aperture linear retarder waveplate. Mueller matrix images are determined for spatially varying anisotropic samples consisting of a commercially available (Thorlabs) birefringent resolution target and a spatially patterned titanium slanted columnar thin film deposited onto a glass substrate. Calibration and operation are demonstrated at a single wavelength (530 nm) only, while, in principle, the instrument can operate regardless of wavelength. We refer to this imaging ellipsometry configuration as rotating-anisotropic-mirror-sample-rotating-anisotropic-mirror ellipsometry (RAM-S-RAM-E).

Original languageEnglish (US)
Pages (from-to)28704-28724
Number of pages21
JournalOptics Express
Volume29
Issue number18
DOIs
StatePublished - Aug 30 2021

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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