Multi-view object topography measurement with optical sectioning structured illumination microscopy

Feifei Ren, Zhaojun Wang, Jia Qian, Yansheng Liang, Shipei Dang, Yanan Cai, Piero R. Bianco, Baoli Yao, Ming Lei

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Various optical instruments have been developed for three-dimensional (3D) surface topography, including the white light interference, reflectance confocal microscopes, and digital holographic microscopes, etc. However, the steep local slope of objects may cause the light to be reflected in a way that it will not be captured by the objective lens because of the finite collection angle of the objective. To solve this “shadow problem,” we report a method to enlarge the collection angle range of optical sectioning structured illumination microscopy by capturing sectioned images of the objects from multiple angle of views. We develop a multi-view image fusion algorithm to reconstruct a single 3D image. Using this method, we detect previously invisible details whose slopes are beyond the collection angle of the objective. The proposed approach is useful for height map measurement and quantitative analyses in a variety of fields, such as biology, materials science, microelectronics, etc.

Original languageEnglish (US)
Pages (from-to)6288-6294
Number of pages7
JournalApplied optics
Volume58
Issue number23
DOIs
StatePublished - Aug 10 2019
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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