Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions

H. Q. Li, R. H. Ono, D. A. Rudman, L. R. Vale, S. H. Liou

Research output: Contribution to journalArticlepeer-review


A new process for making high-temperature superconducting multilayer circuits is reported in detail. Proximity exposure was used to form controllable shallow edges which are required for the crossovers and interconnects. Small features with shallow edges can be achieved by the combination of contact exposure and proximity exposure. Stacked Josephson junctions on STO bicrystal substrates were prepared using this process and tested. A multilayer low-inductance dc-SQUID fabricated using this process shows large voltage modulation. Published by Elsevier Science Ltd.

Original languageEnglish (US)
Pages (from-to)711-717
Number of pages7
JournalApplied Superconductivity
Issue number10-12
StatePublished - 1999

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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