Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions

H. Q. Li; R. H. Ono; D. A. Rudman; L. R. Vale; S. H. Liou

doi:10.1016/S0964-1807(99)00033-2

Multilayer processing of high-T_c films and stacked bicrystal Josephson junctions

H. Q. Li, R. H. Ono, D. A. Rudman, L. R. Vale, S. H. Liou

Research output: Contribution to journal › Article › peer-review

Abstract

A new process for making high-temperature superconducting multilayer circuits is reported in detail. Proximity exposure was used to form controllable shallow edges which are required for the crossovers and interconnects. Small features with shallow edges can be achieved by the combination of contact exposure and proximity exposure. Stacked Josephson junctions on STO bicrystal substrates were prepared using this process and tested. A multilayer low-inductance dc-SQUID fabricated using this process shows large voltage modulation. Published by Elsevier Science Ltd.

Original language	English (US)
Pages (from-to)	711-717
Number of pages	7
Journal	Applied Superconductivity
Volume	6
Issue number	10-12
DOIs	https://doi.org/10.1016/S0964-1807(99)00033-2
State	Published - 1999

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1016/S0964-1807(99)00033-2

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title = "Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions",

abstract = "A new process for making high-temperature superconducting multilayer circuits is reported in detail. Proximity exposure was used to form controllable shallow edges which are required for the crossovers and interconnects. Small features with shallow edges can be achieved by the combination of contact exposure and proximity exposure. Stacked Josephson junctions on STO bicrystal substrates were prepared using this process and tested. A multilayer low-inductance dc-SQUID fabricated using this process shows large voltage modulation. Published by Elsevier Science Ltd.",

author = "Li, {H. Q.} and Ono, {R. H.} and Rudman, {D. A.} and Vale, {L. R.} and Liou, {S. H.}",

note = "Funding Information: S.H.L. was supported in part by DOE Grant No. DE-FG02-90ER45427.",

year = "1999",

doi = "10.1016/S0964-1807(99)00033-2",

language = "English (US)",

volume = "6",

pages = "711--717",

journal = "Applied Superconductivity",

issn = "0964-1807",

publisher = "Pergamon Press Ltd.",

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TY - JOUR

T1 - Multilayer processing of high-Tc films and stacked bicrystal Josephson junctions

AU - Li, H. Q.

AU - Ono, R. H.

AU - Rudman, D. A.

AU - Vale, L. R.

AU - Liou, S. H.

N1 - Funding Information: S.H.L. was supported in part by DOE Grant No. DE-FG02-90ER45427.

PY - 1999

Y1 - 1999

N2 - A new process for making high-temperature superconducting multilayer circuits is reported in detail. Proximity exposure was used to form controllable shallow edges which are required for the crossovers and interconnects. Small features with shallow edges can be achieved by the combination of contact exposure and proximity exposure. Stacked Josephson junctions on STO bicrystal substrates were prepared using this process and tested. A multilayer low-inductance dc-SQUID fabricated using this process shows large voltage modulation. Published by Elsevier Science Ltd.

AB - A new process for making high-temperature superconducting multilayer circuits is reported in detail. Proximity exposure was used to form controllable shallow edges which are required for the crossovers and interconnects. Small features with shallow edges can be achieved by the combination of contact exposure and proximity exposure. Stacked Josephson junctions on STO bicrystal substrates were prepared using this process and tested. A multilayer low-inductance dc-SQUID fabricated using this process shows large voltage modulation. Published by Elsevier Science Ltd.

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U2 - 10.1016/S0964-1807(99)00033-2

DO - 10.1016/S0964-1807(99)00033-2

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AN - SCOPUS:0032173972

SN - 0964-1807

VL - 6

SP - 711

EP - 717

JO - Applied Superconductivity

JF - Applied Superconductivity

IS - 10-12

ER -

Multilayer processing of high-T_c films and stacked bicrystal Josephson junctions

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