Multiple-layered effective medium approximation approach to modeling environmental effects on alumina passivated highly porous silicon nanostructured thin films measured by in-situ Mueller matrix ellipsometry

Alyssa Mock, Timothy Carlson, Jeremy VanDerslice, Joel Mohrmann, John A. Woollam, Eva Schubert, Mathias Schubert

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

Optical changes in alumina passivated highly porous silicon slanted columnar thin films during controlled exposure to toluene vapor are reported. Electron-beam evaporation glancing angle deposition and subsequent atomic layer deposition are utilized to deposit alumina passivated nanostructured porous silicon thin films. In-situ Mueller matrix generalized spectroscopic ellipsometry in an environmental cell is then used to determine changes in optical properties of the nanostructured thin films by inspection of individual Mueller matrix elements, each of which exhibit sensitivity to adsorption. The use of a multiple-layered effective medium approximation model allows for accurate description of the inhomogeneous nature of toluene adsorption onto alumina passivated highly porous silicon slanted columnar thin films.

Original languageEnglish (US)
Pages (from-to)663-666
Number of pages4
JournalApplied Surface Science
Volume421
DOIs
StatePublished - Nov 1 2017

Keywords

  • Adsorption
  • Ellipsometry
  • In-situ
  • Mueller matrix
  • Porous silicon

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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