Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation

Chyiu Hyia Poon, Byung Jin Cho, Yong Feng Lu, Mousumi Bhat, Alex See

Research output: Contribution to journalArticle

23 Scopus citations
Original languageEnglish (US)
Pages (from-to)706-709
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number2
DOIs
StatePublished - 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation'. Together they form a unique fingerprint.

  • Cite this