Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation

Chyiu Hyia Poon, Byung Jin Cho, Yong Feng Lu, Mousumi Bhat, Alex See

Research output: Contribution to journalArticlepeer-review

24 Scopus citations
Original languageEnglish (US)
Pages (from-to)706-709
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
StatePublished - 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this