Nano electro-machining (nano-EM): A novel method for sculpting nano vias (< 20 nm) for nanoscale packaging

Keyphrases

• Atomically Flat 50%
• Biomedical Applications 50%
• Dielectric Oil 100%
• Difficult-to-machine Materials 50%
• Iridium Electrode 50%
• Machining Process 50%
• Materials for Electronics 50%
• Nanoscale Features 50%
• Oil Compounds 50%
• Platinum-iridium 50%
• Resonant Tunneling 50%
• Scanning Probe 50%
• Tool Electrode 50%

Material Science

• Dielectric Material 100%
• Iridium 50%
• Machining 100%
• Platinum 50%

Engineering

• Dielectrics 66%
• Medical Applications 33%
• Nanoscale 100%
• Resonant Tunneling 33%