TY - GEN
T1 - Nano-robot enabled characterizations of local electrical properties for nano-structures
AU - Chen, Hongzhi
AU - Xi, Ning
AU - Song, Bo
AU - Yang, Ruiguo
AU - Lai, King W.C.
AU - Chen, Liangliang
AU - Qu, Chengeng
PY - 2012
Y1 - 2012
N2 - Local electrical characterization has wide spectrum of applications in various areas. However, there are a number of difficulties that hinder the precise measurement of local electrical properties of samples, particularly those within nano-scale spatial resolution. Inspired by these challenges, we developed a nano-robot enabled electrical characterization system that can be utilized to pinpoint the local electrical properties of materials, devices, and bioentities with high spatial and electrical resolution. This system consists of an electrical characterization unit and a nano-robot with an augment reality system, which was developed from a traditional atomic force microscopy (AFM). The augment reality system provides real-time visual feedback. The real-time visual display integrated with the real-time force feedback from the nano-robot allows a precise control of the position and force of the AFM tips towards samples, which are significant for the sensitivity of local electrical measurement. The system design and implementation are presented in the paper. Experiments were carried out to study the local conductance of a multi-wall carbon nanotube (MWCNT), demonstrating the effectiveness of this system.
AB - Local electrical characterization has wide spectrum of applications in various areas. However, there are a number of difficulties that hinder the precise measurement of local electrical properties of samples, particularly those within nano-scale spatial resolution. Inspired by these challenges, we developed a nano-robot enabled electrical characterization system that can be utilized to pinpoint the local electrical properties of materials, devices, and bioentities with high spatial and electrical resolution. This system consists of an electrical characterization unit and a nano-robot with an augment reality system, which was developed from a traditional atomic force microscopy (AFM). The augment reality system provides real-time visual feedback. The real-time visual display integrated with the real-time force feedback from the nano-robot allows a precise control of the position and force of the AFM tips towards samples, which are significant for the sensitivity of local electrical measurement. The system design and implementation are presented in the paper. Experiments were carried out to study the local conductance of a multi-wall carbon nanotube (MWCNT), demonstrating the effectiveness of this system.
KW - Atomic Force Microscopy (AFM)
KW - Augmented Reality
KW - Electrical Characterization
KW - Nano-robot
UR - http://www.scopus.com/inward/record.url?scp=84869191642&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84869191642&partnerID=8YFLogxK
U2 - 10.1109/NANO.2012.6322154
DO - 10.1109/NANO.2012.6322154
M3 - Conference contribution
AN - SCOPUS:84869191642
SN - 9781467321983
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
T2 - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Y2 - 20 August 2012 through 23 August 2012
ER -