Nanofabrication and nanocharacterization using near-field optics

Kaijun Yi, Yongfeng Lu

Research output: Chapter in Book/Report/Conference proceedingChapter


In this chapter, techniques and platforms to fabricate and characterize nanostructures using optical approaches based on tip-enhanced near-eld effects are introduced. The background of these techniques is reviewed. The details of a nano-Raman spectrometer and imaging system developed for characterizing materials and devices at nanoscales and a laser-assisted scanning tunneling microscope (LASTM) developed for performing surface nanostructuring are presented. Both the nano-Raman spectrometer and LASTM processes feature spatial resolutions of 30 nm, much beyond the optical diffraction limit.

Original languageEnglish (US)
Title of host publicationIntelligent Energy Field Manufacturing
Subtitle of host publicationInterdisciplinary Process Innovations
PublisherCRC Press
Number of pages24
ISBN (Electronic)9781420071030
ISBN (Print)9781420071016
StatePublished - Jan 1 2010

ASJC Scopus subject areas

  • Engineering(all)
  • Energy(all)


Dive into the research topics of 'Nanofabrication and nanocharacterization using near-field optics'. Together they form a unique fingerprint.

Cite this