Nanolithography by tip-enchanced laser irradiation

Y. F. Lu

Research output: Contribution to journalConference articlepeer-review


The mechanism of nanostructure fabrication by tip-enhanced laser irradiation is discussed. Tip-enhanced laser irradiation involves various ways in which the laser beam is integrated with a scanning probe microscope (SPM). When an SPM tip is irradiated with a laser beam, the tip undergoes thermal expansion to cause surface nano-indentations and significantly enhances optical field in proximity to the tip apex which can heat the sample surface to result in phase change and chemical reaction. The development of a general model for the near-field optical intensity induced by a conductive tip under polarized laser irradiation for the laser assisted SPM was also presented.

Original languageEnglish (US)
Pages (from-to)2056-2057
Number of pages2
JournalOSA Trends in Optics and Photonics Series
StatePublished - 2003
EventConference on Lasers and Electro-Optics (CLEO); Postconference Digest - Baltimore, MD, United States
Duration: Jun 1 2003Jun 6 2003

ASJC Scopus subject areas

  • General Engineering


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