Nanolithography by Tip-Enchanced Laser Irradiation

Y. F. Lu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2003
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	1557527334
State	Published - 2003
Externally published	Yes
Event	Conference on Lasers and Electro-Optics, CLEO 2003 - Baltimore, United States Duration: Jun 1 2003 → Jun 6 2003

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference	Conference on Lasers and Electro-Optics, CLEO 2003
Country/Territory	United States
City	Baltimore
Period	6/1/03 → 6/6/03

ASJC Scopus subject areas

@inproceedings{b41d9a7670404a3a9a668444ad0e0cf5,

title = "Nanolithography by Tip-Enchanced Laser Irradiation",

author = "Lu, {Y. F.}",

year = "2003",

language = "English (US)",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2003",

note = "Conference on Lasers and Electro-Optics, CLEO 2003 ; Conference date: 01-06-2003 Through 06-06-2003",

}

TY - GEN

T1 - Nanolithography by Tip-Enchanced Laser Irradiation

AU - Lu, Y. F.

PY - 2003

Y1 - 2003

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UR - http://www.scopus.com/inward/citedby.url?scp=85136257165&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85136257165

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2003

PB - Optica Publishing Group (formerly OSA)

T2 - Conference on Lasers and Electro-Optics, CLEO 2003

Y2 - 1 June 2003 through 6 June 2003

ER -