Nanopatterning of periodically strained surfaces: Predictive kinetic Monte Carlo simulation study

M. I. Larsson; R. F. Sabiryanov; K. Cho; B. M. Clemens

doi:10.1063/1.1597945

Nanopatterning of periodically strained surfaces: Predictive kinetic Monte Carlo simulation study

M. I. Larsson, R. F. Sabiryanov, K. Cho, B. M. Clemens

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Abstract

A study was performed on a method based on kinetic Monte Carlo (KMC) simulations to automatically control the nanopatterning. The strain-assisted nucleation of adatom islands on periodically strained surfaces was used in the method. The effects on the self-organization of strain-relaxed adatom islands and the effects of modified potential energy barriers at step edges were also studied. It was shown that nanopatterns with different geometries can also be predicted by applying KMC simulation model.

Original language	English (US)
Pages (from-to)	3470-3484
Number of pages	15
Journal	Journal of Applied Physics
Volume	94
Issue number	5
DOIs	https://doi.org/10.1063/1.1597945
State	Published - Sep 1 2003
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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abstract = "A study was performed on a method based on kinetic Monte Carlo (KMC) simulations to automatically control the nanopatterning. The strain-assisted nucleation of adatom islands on periodically strained surfaces was used in the method. The effects on the self-organization of strain-relaxed adatom islands and the effects of modified potential energy barriers at step edges were also studied. It was shown that nanopatterns with different geometries can also be predicted by applying KMC simulation model.",

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AU - Cho, K.

AU - Clemens, B. M.

PY - 2003/9/1

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N2 - A study was performed on a method based on kinetic Monte Carlo (KMC) simulations to automatically control the nanopatterning. The strain-assisted nucleation of adatom islands on periodically strained surfaces was used in the method. The effects on the self-organization of strain-relaxed adatom islands and the effects of modified potential energy barriers at step edges were also studied. It was shown that nanopatterns with different geometries can also be predicted by applying KMC simulation model.

AB - A study was performed on a method based on kinetic Monte Carlo (KMC) simulations to automatically control the nanopatterning. The strain-assisted nucleation of adatom islands on periodically strained surfaces was used in the method. The effects on the self-organization of strain-relaxed adatom islands and the effects of modified potential energy barriers at step edges were also studied. It was shown that nanopatterns with different geometries can also be predicted by applying KMC simulation model.

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Nanopatterning of periodically strained surfaces: Predictive kinetic Monte Carlo simulation study

Abstract

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