Nanopatterning of periodically strained surfaces: Predictive kinetic Monte Carlo simulation study

M. I. Larsson, R. F. Sabiryanov, K. Cho, B. M. Clemens

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

A study was performed on a method based on kinetic Monte Carlo (KMC) simulations to automatically control the nanopatterning. The strain-assisted nucleation of adatom islands on periodically strained surfaces was used in the method. The effects on the self-organization of strain-relaxed adatom islands and the effects of modified potential energy barriers at step edges were also studied. It was shown that nanopatterns with different geometries can also be predicted by applying KMC simulation model.

Original languageEnglish (US)
Pages (from-to)3470-3484
Number of pages15
JournalJournal of Applied Physics
Volume94
Issue number5
DOIs
StatePublished - Sep 1 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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