Abstract
A study was performed on a method based on kinetic Monte Carlo (KMC) simulations to automatically control the nanopatterning. The strain-assisted nucleation of adatom islands on periodically strained surfaces was used in the method. The effects on the self-organization of strain-relaxed adatom islands and the effects of modified potential energy barriers at step edges were also studied. It was shown that nanopatterns with different geometries can also be predicted by applying KMC simulation model.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3470-3484 |
| Number of pages | 15 |
| Journal | Journal of Applied Physics |
| Volume | 94 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 1 2003 |
ASJC Scopus subject areas
- Physics and Astronomy(all)
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Larsson, M. I., Sabiryanov, R. F., Cho, K., & Clemens, B. M. (2003). Nanopatterning of periodically strained surfaces: Predictive kinetic Monte Carlo simulation study. Journal of Applied Physics, 94(5), 3470-3484. https://doi.org/10.1063/1.1597945