Nanoscale features by electro- Machining using atomic force microscope

Abdallah H. Alkhaleel, Zuyuan Yu, Murali M. Sundaram, Kamlakar P. Rajurkar, Ajay P. Malshe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations

Abstract

This research aimed to study the feasibility of using the atomic force microscope (AFM) for the machining of nano scale features in deionized water, electrolyte, and dielectric oil environments. Nano conical cavities with different sizes were machined on copper samples when deionized water/electrolytes were used as the medium between the conductive tip and the sample after the application of ultrashort voltage pulses. Geometries and dimensions of the machined cavities were compared for different machining parameters including machining time and on-time pulse duration. The feasibility of machining more complex features has been demonstrated by nano groove machining in dielectric medium: The dimensions of the machined groove were 1000 × 150 × 2.4 nm. In-situ dimensional measurements were performed using NanoScope 5.30b15 software from digital instruments. The possible mechanisms of material removal with this system are also discussed.

Original languageEnglish (US)
Title of host publicationTransactions of the North American Manufacturing Research Institute of SME 2006 - Papers Presented at NAMRC 34
Pages437-444
Number of pages8
StatePublished - 2006
Event34th North American Manufacturing Research Conference - Milwaukee, WI, United States
Duration: May 23 2006May 26 2006

Publication series

NameTransactions of the North American Manufacturing Research Institute of SME
Volume34
ISSN (Print)1047-3025

Conference

Conference34th North American Manufacturing Research Conference
CountryUnited States
CityMilwaukee, WI
Period5/23/065/26/06

Keywords

  • Atomic force microscope (AFM)
  • Electro machining
  • Nano cavity
  • Nano machining

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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