This research aimed to study the feasibility of using the atomic force microscope (AFM) for the machining of nano scale features in deionized water, electrolyte, and dielectric oil environments. Nano conical cavities with different sizes were machined on copper samples when deionized water/electrolytes were used as the medium between the conductive tip and the sample after the application of ultrashort voltage pulses. Geometries and dimensions of the machined cavities were compared for different machining parameters including machining time and on-time pulse duration. The feasibility of machining more complex features has been demonstrated by nano groove machining in dielectric medium: The dimensions of the machined groove were 1000 × 150 × 2.4 nm. In-situ dimensional measurements were performed using NanoScope 5.30b15 software from digital instruments. The possible mechanisms of material removal with this system are also discussed.