Nanoscale material redistribution induced by spatially modulated femtosecond laser pulses for flexible high-efficiency surface patterning

Andong Wang, Lan Jiang, Xiaowei Li, Zhijie Xu, Lingling Huang, Kaihu Zhang, Xu Ji, Yongfeng Lu

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

In this paper, we investigated the material redistribution phenomenon controlled by spatially modulated femtosecond laser pulses on a silicon surface. The intensity distribution was shaped by using a spatial light modulator. The material was first selectively melted and then redistributed by the laser-induced plasma. Thus, complex surface patterns were formed conformal to the laser intensity distribution. Sub-diffraction-limit size can be achieved due to the nanoscale material redistribution. Only one pulse was needed in the surface patterning process, thus greatly favoring the efficiency improvement. Combined with multibeam interference, a large-scale nanostructure array can be fabricated with high efficiency of 1600 μm2/pulse. This method offers a simple, flexible and efficient alternative approach for nanoscale surface patterning applications.

Original languageEnglish (US)
Pages (from-to)31431-31442
Number of pages12
JournalOptics Express
Volume25
Issue number25
DOIs
StatePublished - Dec 11 2017

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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