Nanostructuring using laser-assisted scanning probe microscope

J. Shi, Y. F. Lu, L. P. Li, L. Yan, K. Niu, B. Hu, Z. H. Mai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nanostructures were fabricated using laser irradiating at the conductive tip of an atomic force microscope (AFM). The conductive tip behaves like an antenna, which receives electromagnetic energy from the laser beam and then emits electromagnetic wave in nanometer range. In this study, a commercial atomic force microscope, combined with a 514.5 nm argon ion laser and a vertically-polarized 532 nm Nd:YAG pulsed laser, was utilized for modification on the gold and 1813 photo-resist films. AFM imaging and nanostructure modification were conducted at the contact-constant-height mode. AFM images were obtained right after the laser irradiations to monitor the modification process. The effect of the laser intensity, the optical field enhancement, and the thermal expansion of the tip under laser irradiation are investigated.

Original languageEnglish (US)
Title of host publicationICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
PublisherLaser Institute of America
ISBN (Print)0912035757, 9780912035758
DOIs
StatePublished - 2003
EventICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics - Jacksonville, FL, United States
Duration: Oct 13 2003Oct 16 2003

Publication series

NameICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Conference

ConferenceICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CityJacksonville, FL
Period10/13/0310/16/03

ASJC Scopus subject areas

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

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  • Cite this

    Shi, J., Lu, Y. F., Li, L. P., Yan, L., Niu, K., Hu, B., & Mai, Z. H. (2003). Nanostructuring using laser-assisted scanning probe microscope. In ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings [P513] (ICALEO 2003 - 22nd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings). Laser Institute of America. https://doi.org/10.2351/1.5060155