Near-field enhanced laser-assisted deposition

J. Shi, Y. F. Lu, X. Y. Chen, R. S. Cherukuri, K. K. Mendu, N. Batta

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Diamond-like carbon (DLC) coated tips have been successfully applied in field emitter arrays, and scanning probe microscope (SPM) based nanofabrications. DLC deposition on tips is conventionally realized by thermal and plasma-enhanced chemical vapor deposition processes. In this study, we use laser-assisted method employing strongly enhanced near field around the tip apex for DLC deposition. DLC films were deposited on tungsten (W) tips under KrF excimer laser irradiation in a benzene solution and in a laser chemical vapor deposition (LCVD) chamber. Simulation results showed a highly localized optical field enhancement at the tip apex. There was also an optical-field gradient from apex to tip body. Experiment results showed that a locally confined DLC film was deposited based on energy dispersive X-ray (EDX) analysis. Raman spectra showed that at positions close to apexes, films tend to be more diamond-like. This implies that quality of DLC film varies according to local optical intensity along the tip. Hence, the deposition process was confirmed to be induced by the local near field generated by laser and nanotip interaction.

Original languageEnglish (US)
Article number66
Pages (from-to)464-470
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5713
DOIs
StatePublished - 2005
EventPhoton Processing in Microelectronics and Photonics IV - San Jose, CA, United States
Duration: Jan 24 2005Jan 27 2005

Keywords

  • DLC
  • Laser-assisted deposition
  • Near field
  • Tip

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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