Numerical prediction of the etched profile in pyrolytic laser etching of silicon and gallium arsenide

Teng Soon Wee, Yong Feng Lu, Wai Kin Chim

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


A quasi-static two-dimensional heat conduction analysis is used to deduce the geometrical profile of a cavity pyrolytically etched on isotropic silicon and GaAs substrates by a stationary CW argon ion laser with a Gaussian intensity profile. The nonlinear problem is solved using the numerical finite element method. Starting with a substrate having a flat surface, the numerical routine progressively removes regions of the substrate to model the actual etching action. Multiple reflections of the laser beam in the etched cavity are also modeled assuming that the substrate surface is perfectly diffused. Laser etching experiments performed on a silicon substrate in a CCl4 gas ambient are used to verify the numerical routine. Comparison between the experimental and the numerical results indicates that the desorption of SiCl2 radicals is probably responsible for the final etched profile obtained. Numerical results are also compared with the experimental data obtained from previous works carried out on a GaAs substrate.

Original languageEnglish (US)
Pages (from-to)5116-5124
Number of pages9
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number8
StatePublished - Aug 1997
Externally publishedYes


  • Carbon tetrachloride
  • Diffused reflection
  • Gallium arsenide
  • Heat conduction analysis
  • Laser etched profile
  • Laser induced temperature profile
  • Numerical laser etching model
  • Pyrolytic laser etching
  • Silicon

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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