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Optical Characterization of Silicon Oxynitride Thin Films by Variable Angle Spectroscopic Ellipsometry
Yi‐Ming ‐M Xiong, Paul G. Snyder, John A. Woollam, G. A. Al‐Jumaily, F. J. Gagliardi, L. J. Mizerka
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations