Optical constants of crystalline WO3 deposited by magnetron sputtering

Michael J. DeVries, Chris Trimble, Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam, Jeffrey S. Hale

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV.

Original languageEnglish (US)
Pages (from-to)2906-2910
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
StatePublished - 1999
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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