Optical constants of crystalline WO3 deposited by magnetron sputtering

Michael J. DeVries; Chris Trimble; Thomas E. Tiwald; Daniel W. Thompson; John A. Woollam; Jeffrey S. Hale

doi:10.1116/1.581958

Optical constants of crystalline WO₃ deposited by magnetron sputtering

Michael J. DeVries, Chris Trimble, Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam, Jeffrey S. Hale

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

Crystalline WO_3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H⁺ or Li⁺. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV.

Original language	English (US)
Pages (from-to)	2906-2910
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	17
Issue number	5
DOIs	https://doi.org/10.1116/1.581958
State	Published - 1999
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Optical constants of crystalline WO3 deposited by magnetron sputtering",

abstract = "Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV.",

author = "DeVries, {Michael J.} and Chris Trimble and Tiwald, {Thomas E.} and Thompson, {Daniel W.} and Woollam, {John A.} and Hale, {Jeffrey S.}",

year = "1999",

doi = "10.1116/1.581958",

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T1 - Optical constants of crystalline WO3 deposited by magnetron sputtering

AU - DeVries, Michael J.

AU - Trimble, Chris

AU - Tiwald, Thomas E.

AU - Thompson, Daniel W.

AU - Woollam, John A.

AU - Hale, Jeffrey S.

PY - 1999

Y1 - 1999

N2 - Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV.

AB - Crystalline WO3-x is an infrared (IR) electrochromic material having possible applications in satellite thermal control and IR switches. Optical constants of electrochromic materials change upon ion intercalation, usually with H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ ellipsometric data are used to characterize both the deposition process and the optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsometer are combined with data from a mid-infrared Fourier-transform-infrared-based ellipsometer to provide optical constants over a spectral range of 0.031-6.1 eV.

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Optical constants of crystalline WO₃ deposited by magnetron sputtering

Abstract

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