Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

M. Schubert, E. Franke, H. Neumann, T. E. Tiwald, D. W. Thompson, J. A. Woollam, J. Hahn

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

We focus on the application of infrared spectroscopic ellipsometry (IRSE) to simultaneously determine phase and microstructure of mixed-phase thin films such as polymorphic-polycrystalline boron nitride (BN) thin films deposited by magnetron sputtering on (100) silicon. We discuss a recently presented microstructure-dependent model for infrared optical properties of mixed-phase thin films which contain anisotropic materials. In particular, the IRSE data are sensitive to the pure or mixed hexagonal (h) and cubic (c) BN thin film layer structure, phase composition and average grain c-axis distribution of the hexagonal phase.

Original languageEnglish (US)
Pages (from-to)692-696
Number of pages5
JournalThin Solid Films
Volume313-314
DOIs
StatePublished - Feb 13 1998

Keywords

  • Anisotropy
  • Effective medium theory
  • Infrared ellipsometry
  • Mixed-phase thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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