Optical properties of amorphous and polycrystalline tantalum oxide thin films measured by spectroscopic ellipsometry from 0.03 to 8.5 eV

E. Franke, M. Schubert, C. L. Trimble, M. J. DeVries, J. A. Woollam

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

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