Optical properties of RuO2 films deposited by reactive sputtering

A. Belkind; Z. Orban; J. L. Vossen; J. A. Woollam

doi:10.1016/0040-6090(92)90131-T

Optical properties of RuO₂ films deposited by reactive sputtering

A. Belkind, Z. Orban, J. L. Vossen, J. A. Woollam

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

Ruthenium dioxide, RuO₂, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO₂ films are of great academic and practical interest. RuO₂ films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO₂ films were determined using spectroscopic ellipsometry and spectrophotometry.

Original language	English (US)
Pages (from-to)	242-247
Number of pages	6
Journal	Thin Solid Films
Volume	207
Issue number	1-2
DOIs	https://doi.org/10.1016/0040-6090(92)90131-T
State	Published - Jan 30 1992

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/0040-6090(92)90131-T

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abstract = "Ruthenium dioxide, RuO2, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO2 films are of great academic and practical interest. RuO2 films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO2 films were determined using spectroscopic ellipsometry and spectrophotometry.",

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AU - Belkind, A.

AU - Orban, Z.

AU - Vossen, J. L.

AU - Woollam, J. A.

PY - 1992/1/30

Y1 - 1992/1/30

N2 - Ruthenium dioxide, RuO2, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO2 films are of great academic and practical interest. RuO2 films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO2 films were determined using spectroscopic ellipsometry and spectrophotometry.

AB - Ruthenium dioxide, RuO2, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO2 films are of great academic and practical interest. RuO2 films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO2 films were determined using spectroscopic ellipsometry and spectrophotometry.

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Optical properties of RuO₂ films deposited by reactive sputtering

Abstract

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