Optical properties of RuO2 films deposited by reactive sputtering

A. Belkind, Z. Orban, J. L. Vossen, J. A. Woollam

Research output: Contribution to journalArticlepeer-review

40 Scopus citations


Ruthenium dioxide, RuO2, belongs to the family of transition metal compounds of the platinum group and has unique environmental stability. Owing to its combination of extreme physical and chemical properties, RuO2 films are of great academic and practical interest. RuO2 films were deposited by d.c. reactive sputtering in an in-line sputtering system on a dynamic substrate. The resistivity and optical properties of the films were investigated. The optical and dielectric constants of RuO2 films were determined using spectroscopic ellipsometry and spectrophotometry.

Original languageEnglish (US)
Pages (from-to)242-247
Number of pages6
JournalThin Solid Films
Issue number1-2
StatePublished - Jan 30 1992

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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