Overview of variable-angle spectroscopic ellipsometry (VASE): I. Basic theory and typical applications

John A. Woollam, Blaine D. Johs, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, Corey L. Bungay

Research output: Contribution to journalConference articlepeer-review

172 Scopus citations


Variable angle spectroscopic ellipsometry (VASE) is important for metrology in several industries, and is a powerful technique for research on new materials and processes. Sophisticated instrumentation and software for VASE data acquisition and analysis is available for the most demanding research applications, while simple to use software enables the use of VASE for routine measurements as well. This article gives a basic introduction to the theory of ellipsometry, references "classic" papers, and shows typical VASE applications. In the following companion paper, more advanced applications are discussed.

Original languageEnglish (US)
Article number1029402
Pages (from-to)3-28
Number of pages26
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - Jul 19 1999
Externally publishedYes
EventOptical Metrology: A Critical Review 1999 - Denver, United States
Duration: Jul 18 1999Jul 23 1999


  • Ellipsometry
  • metrology
  • optical properties
  • spectroscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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