Abstract
Variable angle spectroscopic ellipsometry (VASE) is important for metrology in several industries, and is a powerful technique for research on new materials and processes. Sophisticated instrumentation and software for VASE data acquisition and analysis is available for the most demanding research applications, while simple to use software enables the use of VASE for routine measurements as well. This article gives a basic introduction to the theory of ellipsometry, references "classic" papers, and shows typical VASE applications. In the following companion paper, more advanced applications are discussed.
| Original language | English (US) |
|---|---|
| Article number | 1029402 |
| Pages (from-to) | 3-28 |
| Number of pages | 26 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 10294 |
| DOIs | |
| State | Published - Jul 19 1999 |
| Externally published | Yes |
| Event | Optical Metrology: A Critical Review 1999 - Denver, United States Duration: Jul 18 1999 → Jul 23 1999 |
Keywords
- Ellipsometry
- metrology
- optical properties
- spectroscopy
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering