Overview of variable-angle spectroscopic ellipsometry (VASE): II. Advanced applications

Blaine Johs, John A. Woollam, Craig M. Herzinger, James N. Hilfiker, Ron A. Synowicki, Corey L. Bungay

Research output: Contribution to journalConference article

106 Scopus citations

Abstract

A preceding companion paper provides a general introduction to Variable Angle Spectroscopic Ellipsometry (VASE), and also describes many typical applications of the technique. In this paper, more advanced VASE applications are discussed. These applications rely on recent advances in ellipsometric hardware, which allow extremely accurate ellipsometric data to be acquired over a broad spectral range, from the IR to VUV. This instrumentation can also quantitatively measure the optical response of nonisotropic samples. Advanced data analysis techniques are also presented.

Original languageEnglish (US)
Article number1029404
Pages (from-to)29-58
Number of pages30
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume10294
DOIs
StatePublished - Jul 19 1999
EventOptical Metrology: A Critical Review 1999 - Denver, United States
Duration: Jul 18 1999Jul 23 1999

Keywords

  • Mueller matrix.
  • advanced instrumentation
  • anisotropy
  • depolarization
  • ellipsometry
  • multi-sample analysis
  • parametric models

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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