Oxygen plasma effects on optical properties of ZnSe films

Li Yan, John A. Woollam, Eva Franke

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


The Herzinger-Johs model was used to obtain excellent fits over the entire spectral range available, starting from the VUV up to the middle IR. Six critical points were observed. Drastic changes were detected upon oxygen plasma irradiation in the VUV-UV-VIS-NIR region, while few were seen in the middle IR. Theoretical infrared electrochromic device performance was evaluated based on previous experimental device results, along with optical data obtained from the experiments.

Original languageEnglish (US)
Pages (from-to)693-701
Number of pages9
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Issue number3
StatePublished - May 2002
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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