Phase and microstructure investigations of boron nitride thin films by spectroscopic ellipsometry in the visible and infrared spectral range

Eva Franke, Mathias Schubert, Horst Neumann, Thomas E. Tiwald, Daniel W. Thompson, John A. Woollam, Jens Hahn, Frank Richter

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

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Physics & Astronomy