Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition

J. Shi; Y. F. Lu; X. Y. Chen; R. S. Cherukuri; K. K. Mendu; H. Wang; N. Batta

doi:10.1063/1.1887840

Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition

J. Shi, Y. F. Lu, X. Y. Chen, R. S. Cherukuri, K. K. Mendu, H. Wang, N. Batta

Electrical & Computer Engineering

Research output: Contribution to journal › Article › peer-review

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Abstract

Diamond-like carbon (DLC) films were deposited on tungsten (W) tips under the KrF excimer laser in a laser chemical vapor deposition (LCVD) chamber. Raman spectroscopy showed that the deposited DLC films were phase-graded along the tips from the apexes. The DLC films were more diamondlike at or near the tip apexes. From numerical simulation, there is a strongly confined and enhanced optical field at the tip apexes. The simulation also indicates that there is an optical-field gradient from tip apexes to tip bodies. Therefore, the variations in the phases of deposited DLC films were attributed to the corresponding variations in local optical intensities along the tips. Hence, optical local near field was confirmed to be responsible to the DLC deposition.

Original language	English (US)
Article number	131918
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	86
Issue number	13
DOIs	https://doi.org/10.1063/1.1887840
State	Published - Mar 28 2005

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition",

abstract = "Diamond-like carbon (DLC) films were deposited on tungsten (W) tips under the KrF excimer laser in a laser chemical vapor deposition (LCVD) chamber. Raman spectroscopy showed that the deposited DLC films were phase-graded along the tips from the apexes. The DLC films were more diamondlike at or near the tip apexes. From numerical simulation, there is a strongly confined and enhanced optical field at the tip apexes. The simulation also indicates that there is an optical-field gradient from tip apexes to tip bodies. Therefore, the variations in the phases of deposited DLC films were attributed to the corresponding variations in local optical intensities along the tips. Hence, optical local near field was confirmed to be responsible to the DLC deposition.",

author = "J. Shi and Lu, {Y. F.} and Chen, {X. Y.} and Cherukuri, {R. S.} and Mendu, {K. K.} and H. Wang and N. Batta",

note = "Funding Information: The authors would like to thank Nebraska Research Initiative, NSF MRSEC at University of Nebraska-Lincoln, and Research Foundation for Opto-Science and Technology (Japan) for financially supporting this research work.",

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T1 - Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition

AU - Shi, J.

AU - Lu, Y. F.

AU - Chen, X. Y.

AU - Cherukuri, R. S.

AU - Mendu, K. K.

AU - Wang, H.

AU - Batta, N.

N1 - Funding Information: The authors would like to thank Nebraska Research Initiative, NSF MRSEC at University of Nebraska-Lincoln, and Research Foundation for Opto-Science and Technology (Japan) for financially supporting this research work.

PY - 2005/3/28

Y1 - 2005/3/28

N2 - Diamond-like carbon (DLC) films were deposited on tungsten (W) tips under the KrF excimer laser in a laser chemical vapor deposition (LCVD) chamber. Raman spectroscopy showed that the deposited DLC films were phase-graded along the tips from the apexes. The DLC films were more diamondlike at or near the tip apexes. From numerical simulation, there is a strongly confined and enhanced optical field at the tip apexes. The simulation also indicates that there is an optical-field gradient from tip apexes to tip bodies. Therefore, the variations in the phases of deposited DLC films were attributed to the corresponding variations in local optical intensities along the tips. Hence, optical local near field was confirmed to be responsible to the DLC deposition.

AB - Diamond-like carbon (DLC) films were deposited on tungsten (W) tips under the KrF excimer laser in a laser chemical vapor deposition (LCVD) chamber. Raman spectroscopy showed that the deposited DLC films were phase-graded along the tips from the apexes. The DLC films were more diamondlike at or near the tip apexes. From numerical simulation, there is a strongly confined and enhanced optical field at the tip apexes. The simulation also indicates that there is an optical-field gradient from tip apexes to tip bodies. Therefore, the variations in the phases of deposited DLC films were attributed to the corresponding variations in local optical intensities along the tips. Hence, optical local near field was confirmed to be responsible to the DLC deposition.

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Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition

Abstract

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