Original language | English (US) |
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Pages (from-to) | xvii |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 4426 |
State | Published - 2002 |
Externally published | Yes |
Event | Second International Symposium on Laser Precision Microfabrication - Singapore, Singapore Duration: May 16 2001 → May 18 2001 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering