Progress in spectroscopic ellipsometry: Applications from vacuum ultraviolet to infrared

James N. Hilfiker, Corey L. Bungay, Ron A. Synowicki, Thomas E. Tiwald, Craig M. Herzinger, Blaine Johs, Greg K. Pribil, John A. Woollam

Research output: Contribution to journalArticlepeer-review

56 Scopus citations


Spectroscopic ellipsometry has been applied to a diverse range of applications pertaining to thin film and bulk material characterization. Traditionally, SE characterization was applied across the UV, visible, and NIR wavelength ranges. New developments have extended the available range to both the VUV and IR. Applications of SE that utilize wavelength-specific information are reviewed. In addition, the wavelength regions are discussed with a survey of application progress in these areas.

Original languageEnglish (US)
Pages (from-to)1103-1108
Number of pages6
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - Jul 2003
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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