Abstract
Spectroscopic ellipsometry has been applied to a diverse range of applications pertaining to thin film and bulk material characterization. Traditionally, SE characterization was applied across the UV, visible, and NIR wavelength ranges. New developments have extended the available range to both the VUV and IR. Applications of SE that utilize wavelength-specific information are reviewed. In addition, the wavelength regions are discussed with a survey of application progress in these areas.
Original language | English (US) |
---|---|
Pages (from-to) | 1103-1108 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 21 |
Issue number | 4 |
DOIs | |
State | Published - Jul 2003 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films