Abstract
Nano-electromachining (nano-EM) is a process in which electric fields applied across sub-20 nm tool-workpiece gaps in organic dielectrics (n-decane C10H22 and n-undecane C12H26) are used to produce nanometer size features (8-80 nm) in electrically conductive materials. In order to improve the speed of nano-EM for manufacturing, utilization of pulse breakdown phenomena is studied. Linear behavior of Paschen curves for pulse breakdown demonstrated the predictability of pulse nano-EM process. The discharge current in the machining gap showed exponential decay behavior in the post-breakdown regime with certain delay. This delay in current recovery may present a limit to improving nano-EM production speeds and suggests a need for external pressurized dielectric flow over self-guided diffusion. Other notable effects such as adsorption compression limited dielectric diffusion and the variation in the recovery current with the tool-workpiece gap along with their engineering implications are discussed.
Original language | English (US) |
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Pages (from-to) | 309151-309158 |
Number of pages | 8 |
Journal | Journal of Manufacturing Science and Engineering |
Volume | 132 |
Issue number | 3 |
DOIs | |
State | Published - Jun 2010 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Computer Science Applications
- Industrial and Manufacturing Engineering