Abstract
Manganese in the low alloy steel was analyzed quantitatively using micro-laser-induced breakdown spectroscopy. The spatial resolution of 20 μm and the single pulse limit of detection of 0.10% were obtained. The calibration curve of Mn was established with basic calibration method, with determination coefficient (R2) of 0.97. The average relative error of Mn concentration prediction on 7 samples is 12.91%, and the root-mean-square error of cross-validation (RMSECV) is 0.11%. The R2 reaches 0.99 when using internal calibration method, as well as the average relative error of Mn concentration prediction on 7 samples and RMSECV were decreased to 7.25% and 0.07%, respectively. These results show that MicroLIBS technique is an effective approach for material surfaces quantitative microanalysis.
Original language | English (US) |
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Pages (from-to) | 1254-1258 |
Number of pages | 5 |
Journal | Guang Pu Xue Yu Guang Pu Fen Xi/Spectroscopy and Spectral Analysis |
Volume | 37 |
Issue number | 4 |
DOIs | |
State | Published - Apr 1 2017 |
Externally published | Yes |
Keywords
- Laser-induced breakdown spectroscopy
- Microscope optics
- Mn
- Quantitative analysis
ASJC Scopus subject areas
- Instrumentation
- Spectroscopy