@inproceedings{ee41c6b0b619402e826c8592836ecb4e,
title = "Rapid fabrication of graphene on dielectric substrates via solid-phase processes",
abstract = "To unleash the full potential of graphene in functional devices, high-quality graphene sheets and patterns are frequently required to be deposited on dielectric substrates. However, it generally calls for post-growth catalyst etching and graphene transfer steps in currently existing approaches, which are very time consuming and costly for fabricating functional graphene devices. We developed a rapid and cost-effective growth method to achieve the graphene formation directly on various kinds of dielectric substrates via a novel solid-phase transformation mechanism based on Ni/C thin films. High-quality graphene was obtained uniformly on whole surface of wafers with a controlled number of graphene layers. The monolayer graphene, as obtained, exhibits a low sheet resistance of about 50 Ω/sq and a high optical transmittance of 95.8% at 550 nm. Graphene patterns were successfully fabricated simply by either conventional photolithography or laser direct writing techniques. Various graphene patterns, including texts, spirals, line arrays, and even large-scale integrated circuit patterns, with a feature line width of 800 nm and a low sheet resistance of 205 ohm/sq, were achieved. The developed method provides a facile and cost-effective way to fabricate complex and high-quality graphene patterns directly on target substrates, which opens a door for fabricating various advanced optoelectronic devices.",
keywords = "Graphene, graphene patterns, laser direct writing, rapid thermal annealing",
author = "W. Xiong and Zhou, {Y. S.} and Hou, {W. J.} and Lu, {Y. F.}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Synthesis and Photonics of Nanoscale Materials XII ; Conference date: 08-02-2015 Through 10-02-2015",
year = "2015",
doi = "10.1117/12.2080691",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Dubowski, {Jan J.} and Geohegan, {David B.} and Kabashin, {Andrei V.}",
booktitle = "Synthesis and Photonics of Nanoscale Materials XII",
}