Abstract
Audible acoustic wave detection was used to study KrF excimer laser ablation of indium tin oxide (ITO) thin films for liquid crystal display (LCD) patterning. The audible acoustic waves were detected due to shock wave generation during ITO laser ablation for laser fluence higher than the threshold. However, application of more laser pulses dropped the amplitude to zero due to the complete removal of the ITO layer which accounts for the simultaneous ablation of the ITO layer and the glass substrate. Threshold fluences for glass and ITO ablation were estimated to set up a parameter window to control LCD patterning in real time.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 91-96 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 526 |
| DOIs | |
| State | Published - 1998 |
| Event | Proceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA Duration: Apr 13 1998 → Apr 16 1998 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
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Hong, M. H., Lu, Y. F., Meng, M., & Low, T. S. (1998). Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning. Materials Research Society Symposium - Proceedings, 526, 91-96. https://doi.org/10.1557/proc-526-91