Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning

M. H. Hong; Y. F. Lu; M. Meng; T. S. Low

doi:10.1557/proc-526-91

Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning

M. H. Hong, Y. F. Lu, M. Meng, T. S. Low

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Audible acoustic wave detection was used to study KrF excimer laser ablation of indium tin oxide (ITO) thin films for liquid crystal display (LCD) patterning. The audible acoustic waves were detected due to shock wave generation during ITO laser ablation for laser fluence higher than the threshold. However, application of more laser pulses dropped the amplitude to zero due to the complete removal of the ITO layer which accounts for the simultaneous ablation of the ITO layer and the glass substrate. Threshold fluences for glass and ITO ablation were estimated to set up a parameter window to control LCD patterning in real time.

Original language	English (US)
Pages (from-to)	91-96
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	526
DOIs	https://doi.org/10.1557/proc-526-91
State	Published - 1998
Externally published	Yes
Event	Proceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA Duration: Apr 13 1998 → Apr 16 1998

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning",

abstract = "Audible acoustic wave detection was used to study KrF excimer laser ablation of indium tin oxide (ITO) thin films for liquid crystal display (LCD) patterning. The audible acoustic waves were detected due to shock wave generation during ITO laser ablation for laser fluence higher than the threshold. However, application of more laser pulses dropped the amplitude to zero due to the complete removal of the ITO layer which accounts for the simultaneous ablation of the ITO layer and the glass substrate. Threshold fluences for glass and ITO ablation were estimated to set up a parameter window to control LCD patterning in real time.",

author = "Hong, {M. H.} and Lu, {Y. F.} and M. Meng and Low, {T. S.}",

year = "1998",

doi = "10.1557/proc-526-91",

language = "English (US)",

volume = "526",

pages = "91--96",

journal = "Materials Research Society Symposium - Proceedings",

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publisher = "Materials Research Society",

note = "Proceedings of the 1998 MRS Spring Meeting ; Conference date: 13-04-1998 Through 16-04-1998",

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AU - Hong, M. H.

AU - Lu, Y. F.

AU - Meng, M.

AU - Low, T. S.

PY - 1998

Y1 - 1998

N2 - Audible acoustic wave detection was used to study KrF excimer laser ablation of indium tin oxide (ITO) thin films for liquid crystal display (LCD) patterning. The audible acoustic waves were detected due to shock wave generation during ITO laser ablation for laser fluence higher than the threshold. However, application of more laser pulses dropped the amplitude to zero due to the complete removal of the ITO layer which accounts for the simultaneous ablation of the ITO layer and the glass substrate. Threshold fluences for glass and ITO ablation were estimated to set up a parameter window to control LCD patterning in real time.

AB - Audible acoustic wave detection was used to study KrF excimer laser ablation of indium tin oxide (ITO) thin films for liquid crystal display (LCD) patterning. The audible acoustic waves were detected due to shock wave generation during ITO laser ablation for laser fluence higher than the threshold. However, application of more laser pulses dropped the amplitude to zero due to the complete removal of the ITO layer which accounts for the simultaneous ablation of the ITO layer and the glass substrate. Threshold fluences for glass and ITO ablation were estimated to set up a parameter window to control LCD patterning in real time.

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EP - 96

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

T2 - Proceedings of the 1998 MRS Spring Meeting

Y2 - 13 April 1998 through 16 April 1998

ER -

Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning

Abstract

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