Real-time monitoring of indium tin oxide laser ablation in liquid crystal display patterning

M. H. Hong, Y. F. Lu, M. Meng, T. S. Low

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

Audible acoustic wave detection was used to study KrF excimer laser ablation of indium tin oxide (ITO) thin films for liquid crystal display (LCD) patterning. The audible acoustic waves were detected due to shock wave generation during ITO laser ablation for laser fluence higher than the threshold. However, application of more laser pulses dropped the amplitude to zero due to the complete removal of the ITO layer which accounts for the simultaneous ablation of the ITO layer and the glass substrate. Threshold fluences for glass and ITO ablation were estimated to set up a parameter window to control LCD patterning in real time.

Original languageEnglish (US)
Pages (from-to)91-96
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume526
DOIs
StatePublished - 1998
EventProceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 13 1998Apr 16 1998

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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