Real-time monitoring of laser cleaning by an airborne particle counter

W. D. Song; M. H. Hong; S. H. Lee; Y. F. Lu; T. C. Chong

doi:10.1016/S0169-4332(02)01377-6

Real-time monitoring of laser cleaning by an airborne particle counter

W. D. Song, M. H. Hong, S. H. Lee, Y. F. Lu, T. C. Chong

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

A method to monitor laser cleaning is presented in this paper. During laser cleaning of contamination, particles are generated and/or ejected from a substrate based on laser ablation and laser-induced fast thermal expansion of contaminants and/or the substrate. An airborne particle counter is used to detect the particles ejected from the substrate during laser cleaning at the same time as the irradiation of the laser beam. The cleaning threshold, cleaning efficiency, cleanliness of substrate and ablation threshold of substrate can be monitored by particle detection.

Original language	English (US)
Pages (from-to)	306-310
Number of pages	5
Journal	Applied Surface Science
Volume	208-209
Issue number	1
DOIs	https://doi.org/10.1016/S0169-4332(02)01377-6
State	Published - Mar 15 2003
Externally published	Yes

Keywords

Airborne particle counter
Contaminants
Laser cleaning
Real-time monitoring

ASJC Scopus subject areas

General Chemistry
Condensed Matter Physics
General Physics and Astronomy
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/S0169-4332(02)01377-6

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title = "Real-time monitoring of laser cleaning by an airborne particle counter",

abstract = "A method to monitor laser cleaning is presented in this paper. During laser cleaning of contamination, particles are generated and/or ejected from a substrate based on laser ablation and laser-induced fast thermal expansion of contaminants and/or the substrate. An airborne particle counter is used to detect the particles ejected from the substrate during laser cleaning at the same time as the irradiation of the laser beam. The cleaning threshold, cleaning efficiency, cleanliness of substrate and ablation threshold of substrate can be monitored by particle detection.",

keywords = "Airborne particle counter, Contaminants, Laser cleaning, Real-time monitoring",

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AU - Song, W. D.

AU - Hong, M. H.

AU - Lee, S. H.

AU - Lu, Y. F.

AU - Chong, T. C.

PY - 2003/3/15

Y1 - 2003/3/15

N2 - A method to monitor laser cleaning is presented in this paper. During laser cleaning of contamination, particles are generated and/or ejected from a substrate based on laser ablation and laser-induced fast thermal expansion of contaminants and/or the substrate. An airborne particle counter is used to detect the particles ejected from the substrate during laser cleaning at the same time as the irradiation of the laser beam. The cleaning threshold, cleaning efficiency, cleanliness of substrate and ablation threshold of substrate can be monitored by particle detection.

AB - A method to monitor laser cleaning is presented in this paper. During laser cleaning of contamination, particles are generated and/or ejected from a substrate based on laser ablation and laser-induced fast thermal expansion of contaminants and/or the substrate. An airborne particle counter is used to detect the particles ejected from the substrate during laser cleaning at the same time as the irradiation of the laser beam. The cleaning threshold, cleaning efficiency, cleanliness of substrate and ablation threshold of substrate can be monitored by particle detection.

KW - Airborne particle counter

KW - Contaminants

KW - Laser cleaning

KW - Real-time monitoring

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JO - Applied Surface Science

JF - Applied Surface Science

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Real-time monitoring of laser cleaning by an airborne particle counter

Abstract

Keywords

ASJC Scopus subject areas

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