Recent progress on the modeling of laser surface cleaning

Y. F. Lu; W. D. Song; B. S. Lukyanchuk; M. H. Hong; W. Y. Zheng

doi:10.1557/proc-617-j1.4

Recent progress on the modeling of laser surface cleaning

Y. F. Lu, W. D. Song, B. S. Lukyanchuk, M. H. Hong, W. Y. Zheng

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Laser cleaning has emerged to effectively remove contaminants from solid surfaces. In this paper, recent progress on laser cleaning has been studied. First, a cleaning model is established for removal of particles from substrate surfaces. The model not only explains the influence of fluence on cleaning efficiency, but also predicts the cleaning thresholds. Following that, the optical resonance and near field effect are discussed for transparent particles with a size of a ∼ λ (radiation wavelength) which strongly influences the intensity distribution in the contacted area (substrate surface). The characterization of ejected particles during laser cleaning is finally investigated. It is found that the particle distribution curves closely fit to Gaussian curve.

Original language	English (US)
Pages (from-to)	J141-J1412
Journal	Materials Research Society Symposium - Proceedings
Volume	617
DOIs	https://doi.org/10.1557/proc-617-j1.4
State	Published - 2000
Externally published	Yes
Event	Laser-Solid Interactions for Materials Processing - San Francisco, CA, United States Duration: Apr 25 2000 → Apr 27 2000

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Recent progress on the modeling of laser surface cleaning",

abstract = "Laser cleaning has emerged to effectively remove contaminants from solid surfaces. In this paper, recent progress on laser cleaning has been studied. First, a cleaning model is established for removal of particles from substrate surfaces. The model not only explains the influence of fluence on cleaning efficiency, but also predicts the cleaning thresholds. Following that, the optical resonance and near field effect are discussed for transparent particles with a size of a ∼ λ (radiation wavelength) which strongly influences the intensity distribution in the contacted area (substrate surface). The characterization of ejected particles during laser cleaning is finally investigated. It is found that the particle distribution curves closely fit to Gaussian curve.",

author = "Lu, {Y. F.} and Song, {W. D.} and Lukyanchuk, {B. S.} and Hong, {M. H.} and Zheng, {W. Y.}",

year = "2000",

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note = "Laser-Solid Interactions for Materials Processing ; Conference date: 25-04-2000 Through 27-04-2000",

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T1 - Recent progress on the modeling of laser surface cleaning

AU - Lu, Y. F.

AU - Song, W. D.

AU - Lukyanchuk, B. S.

AU - Hong, M. H.

AU - Zheng, W. Y.

PY - 2000

Y1 - 2000

N2 - Laser cleaning has emerged to effectively remove contaminants from solid surfaces. In this paper, recent progress on laser cleaning has been studied. First, a cleaning model is established for removal of particles from substrate surfaces. The model not only explains the influence of fluence on cleaning efficiency, but also predicts the cleaning thresholds. Following that, the optical resonance and near field effect are discussed for transparent particles with a size of a ∼ λ (radiation wavelength) which strongly influences the intensity distribution in the contacted area (substrate surface). The characterization of ejected particles during laser cleaning is finally investigated. It is found that the particle distribution curves closely fit to Gaussian curve.

AB - Laser cleaning has emerged to effectively remove contaminants from solid surfaces. In this paper, recent progress on laser cleaning has been studied. First, a cleaning model is established for removal of particles from substrate surfaces. The model not only explains the influence of fluence on cleaning efficiency, but also predicts the cleaning thresholds. Following that, the optical resonance and near field effect are discussed for transparent particles with a size of a ∼ λ (radiation wavelength) which strongly influences the intensity distribution in the contacted area (substrate surface). The characterization of ejected particles during laser cleaning is finally investigated. It is found that the particle distribution curves closely fit to Gaussian curve.

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SP - J141-J1412

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

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