Scanning acoustic air microscope

T. Gudra; Z. Kojro; M. Schmachtl; C. Lier; M. Schubert; W. Grill

doi:10.1016/0041-624X(96)80003-C

Scanning acoustic air microscope

T. Gudra, Z. Kojro, M. Schmachtl, C. Lier, M. Schubert, W. Grill

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

Original language	English (US)
Pages (from-to)	711-719
Number of pages	9
Journal	Ultrasonics
Volume	34
Issue number	7
DOIs	https://doi.org/10.1016/0041-624X(96)80003-C
State	Published - Oct 1996
Externally published	Yes

Keywords

Scanning acoustic microscopy
Ultrasonic microscopy in air
Ultrasound

ASJC Scopus subject areas

Acoustics and Ultrasonics

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10.1016/0041-624X(96)80003-C

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@article{98a7a430228447178860cbc527ae8708,

title = "Scanning acoustic air microscope",

abstract = "A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.",

keywords = "Scanning acoustic microscopy, Ultrasonic microscopy in air, Ultrasound",

author = "T. Gudra and Z. Kojro and M. Schmachtl and C. Lier and M. Schubert and W. Grill",

note = "Funding Information: The authors would like to thank OPTEL Ltd from Wroclaw (Poland) for the technologicala ssistancein the constructiono f the transducersa nd B. Junk and A. Czyzewski from the Johann Wolfgang Goethe-Universitat,F rankfurt am Main for the constructiono f the scannerS. pecialt hanksi s addressedto Dr M. Pluta from the TechnicalU niversity of Wroclaw for technical supporta nd discussionD. r T. Gudra gratefullya cknowl-edgess upportb y the DeutscheA kademischeA ustausch Dienst. This work has also been supported by the DeutscheF orschungsgemeinschaft.",

year = "1996",

month = oct,

doi = "10.1016/0041-624X(96)80003-C",

language = "English (US)",

volume = "34",

pages = "711--719",

journal = "Ultrasonics",

issn = "0041-624X",

publisher = "Elsevier B.V.",

number = "7",

}

TY - JOUR

T1 - Scanning acoustic air microscope

AU - Gudra, T.

AU - Kojro, Z.

AU - Schmachtl, M.

AU - Lier, C.

AU - Schubert, M.

AU - Grill, W.

N1 - Funding Information: The authors would like to thank OPTEL Ltd from Wroclaw (Poland) for the technologicala ssistancein the constructiono f the transducersa nd B. Junk and A. Czyzewski from the Johann Wolfgang Goethe-Universitat,F rankfurt am Main for the constructiono f the scannerS. pecialt hanksi s addressedto Dr M. Pluta from the TechnicalU niversity of Wroclaw for technical supporta nd discussionD. r T. Gudra gratefullya cknowl-edgess upportb y the DeutscheA kademischeA ustausch Dienst. This work has also been supported by the DeutscheF orschungsgemeinschaft.

PY - 1996/10

Y1 - 1996/10

N2 - A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

AB - A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

KW - Scanning acoustic microscopy

KW - Ultrasonic microscopy in air

KW - Ultrasound

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DO - 10.1016/0041-624X(96)80003-C

M3 - Article

AN - SCOPUS:0030263348

SN - 0041-624X

VL - 34

SP - 711

EP - 719

JO - Ultrasonics

JF - Ultrasonics

IS - 7

ER -

Scanning acoustic air microscope

Abstract

Keywords

ASJC Scopus subject areas

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