Scanning acoustic air microscope

T. Gudra, Z. Kojro, M. Schmachtl, C. Lier, M. Schubert, W. Grill

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

A new type of focusing transducer, which works efficiently in air, has been developed and employed in a phase sensitive scanning acoustic microscope (PSAM) with air as a coupling medium. The transducers contain a matching layer, which diminishes the insertion loss of the energy. The ultrasonic microscope working on the base of this transducer has a lateral resolution of about 220 μm and is capable of measuring distance (height of the object) variations with a resolution of at least 1 μn. The instrument is therefore capable of high resolution, non-contact topographical mapping of objects in air at normal conditions.

Original languageEnglish (US)
Pages (from-to)711-719
Number of pages9
JournalUltrasonics
Volume34
Issue number7
DOIs
StatePublished - Oct 1996

Keywords

  • Scanning acoustic microscopy
  • Ultrasonic microscopy in air
  • Ultrasound

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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