Science and engineering in laser surface cleaning

Y. F. Lu, W. D. Song, M. H. Hong, Z. M. Ren, Y. W. Zheng

Research output: Contribution to journalConference articlepeer-review


Laser cleaning was demonstrated both theoretically and experimentally to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. The laser-induced removal of film-type contaminants from IC (Integrated Circuit) packages, IC mould, Printed Circuit Board and flexible circuit was studied. The cleaning models were established for removal of particles from substrate surfaces without and with a thin liquid layer by taking adhesion forces and cleaning force into account. The models not only explain the influence of laser fluence on cleaning efficiency, but also predict the cleaning thresholds. Laser-induced removal of particles from magnetic sliders and disk surfaces was investigated. Monitoring of laser cleaning by acoustic wave, electric field signal and particle counter was also addressed.

Original languageEnglish (US)
Pages (from-to)588-599
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2000
Externally publishedYes
EventHigh-Power Laser Ablation III - Santa Fe, NM, USA
Duration: Apr 24 2000Apr 28 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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