Screening effects in metal sculptured thin films studied with terahertz Mueller matrix ellipsometry

T. Hofmann, S. Knight, D. Sekora, D. Schmidt, C. M. Herzinger, J. A. Woollam, E. Schubert, M. Schubert

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The anisotropic optical dielectric functions of a metal (cobalt) slanted columnar thin film deposited by electron-beam glancing angle deposition are reported for the terahertz (THz) frequency domain before and after the slanted columnar thin film was passivated by a conformal alumina coating. A simple effective medium dielectric function homogenization approach which describes isolated, electrically conductive columns rendering the thin film biaxial (orthorhombic) is used to model the observed optical responses. Upon passivating the slanted columnar thin film with a 3 nm thick alumina film an increase of both the real and the imaginary part of the dielectric function for all major polarizability directions is found and attributed to screening effects within the spatially coherent metal nanocolumns.

Original languageEnglish (US)
Pages (from-to)513-517
Number of pages5
JournalApplied Surface Science
Volume421
DOIs
StatePublished - Nov 1 2017

Keywords

  • Bruggeman effective medium
  • Generalized ellipsometry
  • Glancing angle deposition
  • Sculptured thin film
  • Terahertz

ASJC Scopus subject areas

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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