Self-organization of silicon nanocone array induced by pulsed CO 2 laser irradiation

W. J. Wang, Y. F. Lu, C. W. An, M. H. Hong, W. D. Song, T. C. Chong

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

The periodic microfringe structures were induced on the front silicon surface by pulsed CO 2 laser irradiation with the existence of a painting or coating layer on the bottom surface of silicon substrate. The microfringes were formed under single pulse irradiation due to the laser induced periodic surface structure (LIPSS) effect. The nanodot were self-organized in chains under cumulative laser pulse irradiation, and located along the microfringe ridges. The silicon surface was patterned with a nanocone array of two different average sizes at even higher laser intensity. The larger cones distributed in rows, and the smaller cones scattered between the two adjacent rows of the larger cones. The far-infrared absorption of silicon is promoted by the increase of free carrier concentration and thermal energy resulting from the laser interaction with the coating/painting materials at the substrate bottom surface.

Original languageEnglish (US)
Pages (from-to)148-152
Number of pages5
JournalApplied Surface Science
Volume208-209
Issue number1
DOIs
StatePublished - Mar 15 2003

Keywords

  • LIPSS effect
  • Microfringes
  • Nanocones
  • Self-organization

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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